400-6699-117轉(zhuǎn)1000
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工商注冊信息已核實(shí)!參考報價: | 面議 | 型號: | RF-340 系列 |
品牌: | 日本電子 | 產(chǎn)地: | 日本 |
關(guān)注度: | 1286 | 信息完整度: | |
樣本: | 典型用戶: | 暫無 |
400-6699-117轉(zhuǎn)1000
RF-340 系列匹配網(wǎng)絡(luò)自動整合裝置
和產(chǎn)生等離子體的13.56MHz高頻電源組合,與負(fù)載進(jìn)行匹配的自動調(diào)整裝置 (匹配箱 + 控制器) 。
Features特點(diǎn)
RF-340 series Matching Network
An automatic matching device to match the load to the 13.56 MHz RF power supply for plasma generation. Matching box + Controller
Functions功能
Preset (8 point)
Records the settings of each of the variable capacitors for the points that have been matched.
Auto-preset
Auto control driving the variable capacitors to the preset settings when output is zero, and then outputting the RF
Auto-delay
No immediate reaction to sudden changes in the load, such as arcing, with automatic operation after a specified period of time has elapsed.
Variable capacitor position display
Variable capacitor drive range setting
Control of the variable capacitor drive range setting during automatic operation
Vdc display
Vdc meter relay
Vdc stabilization control
Vpp display
Vpp meter relay
Load impedance display
When matching is obtained, the plasma impedance is calculated and displayed
CE compliant (excluding some devices)
技術(shù)規(guī)格:
Matching box匹配箱 | ||||
RF-34021 | RF-34031 | RF-34041 | ||
Permitted transmitted power | 1.5kW | 3kW | 6kW | |
Input connector | N type | LS2 type | ||
Frequency | 13.56MHz | |||
Input impedance | 50 Ω | |||
Fan power supply | DC 24V (supplied from the controller) | |||
Matching control | Vacuum variable capacitor | |||
Tuning control | Vacuum variable capacitor | |||
Residual reflected power | Within 10% of the input power | |||
Cooling method | Water (2~3L/min) | Water (2.5~3L/min) | ||
Dimensions (mm) | Width | 370 | 470 | |
Depth | 300 | 370 | ||
Height | 205 | 246 | ||
Mass (kg) | 15 | 19 | ||
Controller | ||||
Input power | DC 24V, 4A ( to be provided separately ) | |||
Dimensions (mm) | 140 (W) × 305 (D) × 145 (H) | |||
Control method | Digital control | |||
Mass | 1.5kg |
RF-340 系列匹配網(wǎng)絡(luò)自動整合裝置信息由日本電子株式會社(JEOL)為您提供,如您想了解更多關(guān)于RF-340 系列匹配網(wǎng)絡(luò)自動整合裝置報價、型號、參數(shù)等信息,歡迎來電或留言咨詢。
注:該產(chǎn)品未在中華人民共和國食品藥品監(jiān)督管理部門申請醫(yī)療器械注冊和備案,不可用于臨床診斷或治療等相關(guān)用途
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